• The main function of the system: to realize the laser heating sample under ultra-vacuum working conditions and use high-precision quadrupole mass spectrometer to measure
• The main components of the system: mainly composed of double vacuum chambers, the main equipment and components include: double vacuum chambers (i.e., the main vacuum chamber and sample preparation chamber), high vacuum plug valves; Heated desorption stage; injection mechanism; Quickly open the door and look at the window; Electrode-vacuum through components; Quadrupole Mass Spectrometry (QMS) gas analyzer; gas leaks and gas storage vessels; Vacuum, temperature measuring cell; Measurement and control cabinet
• The main technical indicators of the system: the leakage rate of the main chamber and the injection chamber is lower than 5E-10Pa3/s. The dynamic vacuum of the main chamber reaches 5.1E-7Pa, and the dynamic vacuum of the injection chamber up to 2.4E-6Pa